Instruments

Sample Fabrication Equipments

• MBE [VG/EPI]
• MBE [VIEETECH]
• MBE [ULVAC]
• SEM,EB [JEOL�А�]
• SEM,EB [ELIONIX�А�]
• AFM [SII�А�]
• Ion Beam Sputter
• 3-source Sputter
• High-vacuum Deposition Chamber
• Mid-vacuum Deposition Chamber

Measurement Equipments

• 15T Superconducting Magnet
• 9T Superconducting Magnet
• 7T Split-type Superconducting Magnet

MBE
[by VG/EPI]

MBE
[by VIEETECH]

MBE
[by ULVAC]

SEM,EB
[by JEOL]

SEM,EB
[by ELIONIX]

AFM

Ion Beam Sputter

inside

3-source Sputter

High-vacuum Deposition Chamber

Mid-vacuum Deposition Chamber

15T Superconducting Magnet
(Oxford Instruments)

9T Superconducting Magnet

7T Split-type Superconducting Magnet

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Masato Ando <andom@issp.u-tokyo.ac.jp> (23 Sep. 1999)